Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492092 | Hydroxy-epoxide thermally cured undercoat for 193 NM lithography | Patrick Foster, Sydney George Slater, Thomas Steinhausler, John Biafore | 2002-12-10 |
| 6380317 | Production of acetal derivatized hydroxyl aromatic polymers and their use in radiation sensitive formulations | Sanjay Malik, Lawrence Ferreira, Joseph J. Sizensky, Brian Edison Maxwell | 2002-04-30 |