Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494670 | Three chamber load lock apparatus | — | 2002-12-17 |
| 6390448 | Single shaft dual cradle vacuum slot valve | Gregory A. Tomasch | 2002-05-21 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6494670 | Three chamber load lock apparatus | — | 2002-12-17 |
| 6390448 | Single shaft dual cradle vacuum slot valve | Gregory A. Tomasch | 2002-05-21 |