Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428663 | Preventing defect generation from targets through applying metal spray coatings on sidewalls | Glen T. Mori | 2002-08-06 |
| 6416634 | Method and apparatus for reducing target arcing during sputter deposition | Glen T. Mori | 2002-07-09 |
| 6379428 | Method for reducing particle concentration within a semiconductor device fabrication tool | Glen T. Mori | 2002-04-30 |