Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6489801 | Apparatus and method for evaluating a semiconductor wafer | Regina G. Nijmeijer, Jiping Li | 2002-12-03 |
| 6483594 | Apparatus and method for determining the active dopant profile in a semiconductor wafer | Regina G. Nijmeijer | 2002-11-19 |
| 6426644 | Apparatus and method for determining the active dopant profile in a semiconductor wafer | Regina G. Nijmeijer | 2002-07-30 |