Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6407373 | Apparatus and method for reviewing defects on an object | — | 2002-06-18 |
| 6407386 | System and method for automatic analysis of defect material on semiconductors | Alexander Kadyshevitch | 2002-06-18 |
| 6353222 | Determining defect depth and contour information in wafer structures using multiple SEM images | — | 2002-03-05 |