Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455437 | Method and apparatus for monitoring the process state of a semiconductor device fabrication process | Jed Davidow, Dimitris Lymberopoulos | 2002-09-24 |
| 6413867 | Film thickness control using spectral interferometry | Lalitha Balasubramhanya, Jed Davidow, Dimitris Lymberopoulos | 2002-07-02 |
| 6368975 | Method and apparatus for monitoring a process by employing principal component analysis | Lalitha Balasubramhanya, Jed Davidow, Dimitris Lymberopoulos | 2002-04-09 |