Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485254 | Energy dissipating coupling | — | 2002-11-26 |
| 6410889 | Method and apparatus for reducing contamination in a wafer loadlock of a semiconductor wafer processing system | Douglas R. McAllister, David Evans | 2002-06-25 |