Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501081 | Electron flood apparatus for neutralizing charge build up on a substrate during ion implantation | Yashuhiko Matsunaga | 2002-12-31 |
| 6498078 | Method for enhancing the solubility of boron and indium in silicon | Babak Sadigh, Thomas Lenosky, Tomas Diaz de la Rubia, Martin D. Giles, Maria-Jose Caturla +4 more | 2002-12-24 |