Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6501078 | Ion extraction assembly | Theodore H. Smick, Marvin Farley, Takao Sakase | 2002-12-31 |
| 6437351 | Method and apparatus for controlling a workpiece in a vacuum chamber | Theodore H. Smick, Marvin Farley | 2002-08-20 |
| 6423975 | Wafer holder for simox processing | Theodore H. Smick, Bernhard F. Cordts, III, Robert S. Andrews | 2002-07-23 |
| 6350991 | Ion implanter with vacuum piston counterbalance | — | 2002-02-26 |