Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449844 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Robin M. Ellis | 2002-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6449844 | Heat exchanger apparatus for a semiconductor wafer support and method of fabricating same | Thomas M. Duddy, Robin M. Ellis | 2002-09-17 |