Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6466315 | Method and system for reticle inspection by photolithography simulation | Boaz Kenan | 2002-10-15 |
| 6429931 | Method and apparatus for article inspection including speckle reduction | Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov, Boaz Kenan | 2002-08-06 |
| 6369888 | Method and apparatus for article inspection including speckle reduction | Silviu Reinhorn, Emanuel Elysaf, Shimon Yalov, Boaz Kenan | 2002-04-09 |