Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413145 | System for polishing and cleaning substrates | Jay D. Pinson, II | 2002-07-02 |
| 6350188 | Drive system for a carrier head support structure | William R. Bartlett, Jim Tobin | 2002-02-26 |