Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481951 | Multiple sided robot blade for semiconductor processing equipment | Michael P. Karazim | 2002-11-19 |
| 6379221 | Method and apparatus for automatically changing a polishing pad in a chemical mechanical polishing system | Daniel F. Kennedy, Victor Belitsky | 2002-04-30 |