Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6461980 | Apparatus and process for controlling the temperature of a substrate in a plasma reactor chamber | Jeff S. Cheung | 2002-10-08 |
AD
Alexandros T. Demos
Overall (2002): #258,712 of 266,432Top 100%
1
Patents 2002