Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429458 | Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby | Stella W. Pang | 2002-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6429458 | Method of making a micromechanical device from a single crystal semiconductor substrate and monolithic sensor formed thereby | Stella W. Pang | 2002-08-06 |