Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6491083 | Wafer demount receptacle for separation of thinned wafer from mounting carrier | Daniel Stofman | 2002-12-10 |
| 6470946 | Wafer demount gas distribution tool | — | 2002-10-29 |
| 6415843 | Spatula for separation of thinned wafer from mounting carrier | Mark Spencer Grey | 2002-07-09 |