Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500707 | Method for manufacturing a trench capacitor of a memory cell of a semiconductor memory | — | 2002-12-31 |
| 6465370 | Low leakage, low capacitance isolation material | Rolf-Peter Vollertsen, Joachim Hoepfner | 2002-10-15 |
| 6436846 | Combined preanneal/oxidation step using rapid thermal processing | Helmut Tews, Thomas Gaertner | 2002-08-20 |
| 6376348 | Reliable polycide gate stack with reduced sheet resistance and thickness | Matthias Ilg | 2002-04-23 |