Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462964 | High frequency power generator and related methods | Robert M. Porter, Gennady G. Gurov | 2002-10-08 |
| 6384540 | System for high power RF plasma processing | Robert M. Porter, Gennady G. Gurov | 2002-05-07 |