Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493063 | Critical dimension control improvement method for step and scan photolithography | Anna M. Minvielle | 2002-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493063 | Critical dimension control improvement method for step and scan photolithography | Anna M. Minvielle | 2002-12-10 |