Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6459949 | System and method for corrective action tracking in semiconductor processing | Arturo N. Morosoff, Joseph Lebowitz | 2002-10-01 |
| 6430456 | Efficient process tool utilization in semiconductor manufacturing using an additional process tool state | Arturo N. Morosoff | 2002-08-06 |