Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6452198 | Minimized contamination of semiconductor wafers within an implantation system | Bill Chen, Che-Hoo Ng | 2002-09-17 |
| 6448180 | Deposition of in-situ doped semiconductor film and undoped semiconductor film in the same reaction chamber | Bill Chen | 2002-09-10 |
| 6410434 | Method and apparatus for formation of in-situ doped amorphous semiconductor film | — | 2002-06-25 |