Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428716 | Method of etching using hydrofluorocarbon compounds | Matthew H. Luly, Mohammed A. Fathimulla | 2002-08-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428716 | Method of etching using hydrofluorocarbon compounds | Matthew H. Luly, Mohammed A. Fathimulla | 2002-08-06 |