Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6422823 | Mini-environment control system and method | Eric Chevalier | 2002-07-23 |
| 6402479 | Apparatus for pumping out transfer chambers for transferring semiconductor equipment | Marc Lagedamont, Eric Chevalier | 2002-06-11 |