Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6419558 | Apparatus, backing plate, backing film and method for chemical mechanical polishing | Tomoharu Watanabe | 2002-07-16 |
| 6381137 | Semiconductor module | Takao Nakajima, Masaaki Kusui | 2002-04-30 |