Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471735 | Compositions for use in a chemical-mechanical planarization process | Ashutosh Misra, Anthony J. Schleisman | 2002-10-29 |
| 6372022 | Ionic purifier | Wallace I. Yuan | 2002-04-16 |
| 6350425 | On-site generation of ultra-high-purity buffered-HF and ammonium fluoride | R. Scot Clark | 2002-02-26 |