Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495893 | Micro-mechanical actuator including auxiliary lever to enlarge travel range of actuated object | Weileun Fang | 2002-12-17 |
| 6421224 | Micro-structure capacitor | Hung-Yin Tsai, Jung Yen Huang, Chin-Hon Fan | 2002-07-16 |
| 6372610 | Method for die separation of a wafer by ion implantation | Fuh-Yu Chang, Shao-Heng Chang | 2002-04-16 |
| 6359718 | Actuating mechanism for rotating micro-mirror | Weileun Fang | 2002-03-19 |