Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495007 | Methods and apparatus for holding and positioning semiconductor workpieces during electropolishing and/or electroplating of the workplaces | — | 2002-12-17 |
| 6447668 | Methods and apparatus for end-point detection | — | 2002-09-10 |
| 6440295 | Method for electropolishing metal on semiconductor devices | — | 2002-08-27 |
| 6395152 | Methods and apparatus for electropolishing metal interconnections on semiconductor devices | — | 2002-05-28 |
| 6391166 | Plating apparatus and method | — | 2002-05-21 |