Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488821 | System and method for performing sputter deposition using a divergent ion beam source and a rotating substrate | David A. Baldwin | 2002-12-03 |
| 6419802 | System and method for controlling deposition thickness by synchronously varying a sputtering rate of a target with respect to a position of a rotating substrate | David A. Baldwin | 2002-07-16 |
| 6419803 | System and method for making thin-film structures using a stepped profile mask | David A. Baldwin | 2002-07-16 |
| 6402900 | System and method for performing sputter deposition using ion sources, targets and a substrate arranged about the faces of a cube | David A. Baldwin | 2002-06-11 |
| 6402905 | System and method for controlling deposition thickness using a mask with a shadow that varies along a radius of a substrate | David A. Baldwin | 2002-06-11 |
| 6402901 | System and method for performing sputter deposition using a spherical geometry | David A. Baldwin | 2002-06-11 |
| 6402904 | System and method for performing sputter deposition using independent ion and electron sources and a target biased with an a-symmetric bi-polar DC pulse signal | David A. Baldwin | 2002-06-11 |