Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4836733 | Wafer transfer system | Richard J. Hertel, Adrian Delforge, Edward D. MacIntosh, Robert E. Jennings, Akhil Bhargava | 1989-06-06 |
| 4832781 | Methods and apparatus for thermal transfer with a semiconductor wafer in vacuum | — | 1989-05-23 |
| 4817556 | Apparatus for retaining wafers | Richard J. Hertel, Robert V. Brick | 1989-04-04 |