Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4868395 | Electron beam lithography system for delineating a desired pattern on a target by means of electron beams | Izumi Kasahara, Yoshio Suzuki | 1989-09-19 |
| 4810095 | Laser-beam, pattern drawing/inspecting apparatus | Koji Handa | 1989-03-07 |