Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4851295 | Low resistivity tungsten silicon composite film | — | 1989-07-25 |
| 4796562 | Rapid thermal CVD apparatus | Larry R. Lane, Mark W. Goldsborough, Jason M. Samsel, Max Van Mastrigt, Robert F. Foster | 1989-01-10 |