Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4800151 | Radiation-sensitive positive resist comprising a fluorine-containing alpha-chloroacetate copolymer in the specification | Atuto Tokunaga | 1989-01-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4800151 | Radiation-sensitive positive resist comprising a fluorine-containing alpha-chloroacetate copolymer in the specification | Atuto Tokunaga | 1989-01-24 |