Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4812201 | Method of ashing layers, and apparatus for ashing layers | Hiroyuki Sakai, Kazutoshi Yoshioka, Kimiharu Matsumura, Keisuke Shigaki, Shunichi Iimuro +2 more | 1989-03-14 |