Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4857430 | Process and system for determining photoresist development endpoint by effluent analysis | Edwin G. Millis | 1989-08-15 |
| 4857750 | Sensor for determining photoresist developer strength | Edwin G. Millis | 1989-08-15 |
| 4851311 | Process for determining photoresist develop time by optical transmission | Edwin G. Millis | 1989-07-25 |