Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4853102 | Sputtering process and an apparatus for carrying out the same | Hideki Tateishi, Hiroshi Saito, Mitsuaki Horiuchi | 1989-08-01 |
| 4831963 | Plasma processing apparatus | Hiroshi Saito | 1989-05-23 |