Issued Patents 1989
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4849323 | Pattern forming method using contrast enhanced material | Masayuki Endo, Kazufumi Ogawa | 1989-07-18 |
| 4840872 | Pattern forming method by use of X-ray exposure | Masayuki Endo, Kazufumi Ogawa | 1989-06-20 |
| 4841341 | Integrator for an exposure apparatus or the like | Kazufumi Ogawa, Masayuki Endo, Ken Ishihara | 1989-06-20 |
| 4812880 | Exposure apparatus | Kazufumi Ogawa, Masayuki Endo, Takeshi Ishihara | 1989-03-14 |
| 4805000 | Exposure apparatus | Kazufumi Ogawa, Masayuki Endo, Takeshi Ishihara | 1989-02-14 |
| 4805002 | Exposure apparatus | Masayuki Endo, Kazufumi Ogawa, Takeshi Ishihara | 1989-02-14 |