Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4872964 | Planar magnetron sputtering apparatus and its magnetic source | Hidenobu Shirai | 1989-10-10 |
MS
Masafumi Suzuki
Overall (1989): #78,601 of 140,708Top 60%
1
Patents 1989