Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886565 | Reactive ion etching apparatus | Mitsunobu Koshiba, Yoshiyuki Harita, Shin'ichi Kawamura, Yuuji Furuto | 1989-12-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4886565 | Reactive ion etching apparatus | Mitsunobu Koshiba, Yoshiyuki Harita, Shin'ichi Kawamura, Yuuji Furuto | 1989-12-12 |