Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4874484 | Etching method for generating apertured openings or trenches in layers or substrates composed of n-doped silicon | Volker Lehmann | 1989-10-17 |
| 4841239 | Method and measuring instrument for identifying the diffusion length of the minority charge carriers for non-destructive detection of flaws and impurities in semiconductor crystal bodies | Volker Lehmann | 1989-06-20 |