Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4833100 | Method for producing a silicon thin film by MBE using silicon beam precleaning | Hiroshi Hanafusa, Kiyoshi Yoneda | 1989-05-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4833100 | Method for producing a silicon thin film by MBE using silicon beam precleaning | Hiroshi Hanafusa, Kiyoshi Yoneda | 1989-05-23 |