Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4887548 | Thin film manufacturing system | Kazuo Urata, Shigenori Hayashi | 1989-12-19 |
| 4803095 | Chemical vapor reaction process by virtue of uniform irradiation | Shigenori Hayashi, Takashi Inujima, Kenji Ito | 1989-02-07 |