Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4857139 | Method and apparatus for forming a layer | Kazuo Urata, Shunpei Yamazaki | 1989-08-15 |
| 4811684 | Photo CVD apparatus, with deposition prevention in light source chamber | Kazuo Urata, Shunpei Yamazaki | 1989-03-14 |