Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4876984 | Apparatus for forming a thin film | Wasaburo Ohta, Toru Miyabori | 1989-10-31 |
| 4854265 | Thin film forming apparatus | Wasaburo Ohta, Tadao Katuragawa | 1989-08-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4876984 | Apparatus for forming a thin film | Wasaburo Ohta, Toru Miyabori | 1989-10-31 |
| 4854265 | Thin film forming apparatus | Wasaburo Ohta, Tadao Katuragawa | 1989-08-08 |