Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870030 | Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer | Robert J. Markunas, Ronald A. Rudder | 1989-09-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870030 | Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer | Robert J. Markunas, Ronald A. Rudder | 1989-09-26 |