Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4821196 | High resolution automatic focus correction electronic subsystem for E-beam lithography | Donald F. Haire | 1989-04-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4821196 | High resolution automatic focus correction electronic subsystem for E-beam lithography | Donald F. Haire | 1989-04-11 |