Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4887904 | Device for positioning a semi-conductor wafer | Hiroshi Nakazato, Takahiro Akamatsu, Kenji Fukui | 1989-12-19 |
| 4853880 | Device for positioning a semi-conductor wafer | Takahiro Akamatsu, Hiroshi Nakazato, Kenji Fukui | 1989-08-01 |