Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4865445 | Apparatus for detecting faults on the surface of a resist master disc and measuring the thickness of the resist coating layer | Shigeru Kono, Yutaka Takasu, Chiharu Koshio, Kazuhiko Nagata | 1989-09-12 |
| 4850791 | Flow processing system | Yutaka Takasu, Shigeru Kono, Chiharu Koshio, Kazuhiko Nagata | 1989-07-25 |