Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882198 | System and method for vacuum deposition of thin films | Michael D. Temple, Kim L. Johnson | 1989-11-21 |
| 4868003 | System and method for vacuum deposition of thin films | Michael D. Temple, Kim L. Johnson | 1989-09-19 |
| 4851095 | Magnetron sputtering apparatus and process | Michael A. Scobey, James W. Seeser, R. Russel Austin, Paul Lefebvre, Barry W. Manley | 1989-07-25 |