Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4858558 | Film forming apparatus | Hiroshi Sakama, Kenji Araki | 1989-08-22 |
| 4848272 | Apparatus for forming thin films | Hiroshi Sakama, Kenji Araki, Hiroshi Kamio, Yoshinobu Shima | 1989-07-18 |