Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4871237 | Method and apparatus for adjusting imaging performance of projection optical apparatus | Satoru Anzai | 1989-10-03 |
| 4803524 | Method of and apparatus for detecting the accuracy of superposition exposure in an exposure apparatus | Kenji Higashi, Hiroki Tateno | 1989-02-07 |